81002096_0141 2 62.4725/999.56(1061937408) 112 81002096_0141p.dat 516x2 4096(0)/NU 12 2048 0 12196 0 Pleth 81002096_0141r.dat 516 1637(1230)/Ohm 12 2048 0 17234 0 Resp